Semiconductor device leadframe

ABSTRACT

For so called film assisted moulding (FAM) device processing techniques there is provided lead frame for a semiconductor device, comprising a base portion and a connection lead, said base portion arranged for mounting a semiconductor die, said connection lead comprising a horizontal portion for external connection and an angled portion for connection to said semiconductor die, wherein the angled portion has a positive angle with respect to the base portion. The connection lead may comprise a recessed portion.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the priority under 35 U.S.C. §119 of Europeanpatent application No. 13186182.5, filed on Sep. 26, 2013, the contentsof which are incorporated by reference herein.

FIELD

The present invention relates to lead frame for a semiconductor device.In particular, the semiconductor device may be a Radio Frequency (RF)device such as an RF amplifier. The lead frame may be suitable for usein film assisted moulding (FAM) techniques.

BACKGROUND

Semiconductor packages or encapsulations are typically formed of one ormore of metal, plastic, glass, or ceramic materials which are arrangedto house one or more semiconductor dies. Such packages may provideprotection against impact and corrosion and dissipate heat produced inthe die.

In the field of Radio Frequency (RF) electronic devices, such as forexample RF power amplifier devices, RF isolation is necessary to reducethe cross-talk of signals from between channels and also RF returncurrents which may be induced in metal device features. RF isolationalso maintains the integrity of amplified signal, and reduces systemmeasurement uncertainties.

RF technologies device packages such as ceramic brazed packageconstructions or Liquid Crystal Polymer package constructions are knownto provide good RF isolation and EM conduction. However these packageconstructions are expensive to produce.

In general it is known that plastic compound cavity moulded packagesprovide more cost effective alternatives to ceramics and LCP packages.However, there are a number of challenges in applying plastic mouldcompound encapsulations to semiconductor devices, most notablyminimising and controlling so-called mould flashing (also known as mouldcreep or bleeding) to keep metallic floating leads, where additionalelectrical connections such as wire bond will be made free from mouldcompound. In addition RF semiconductor devices and high voltage MOSFETdevices, for example, are known to be high heat dissipating deviceswhich may therefore limit the type of plastic mould compoundencapsulations and moulding techniques available. This is due to thepotential for damage caused to the encapsulation caused by melting.

With reference to FIG. 1, the leads 10 of the lead frame are said to befloating. The term “floating lead” refers to the situation where priorto moulding the lead 10 is held (or floats) over a base 12 of the devicepackage. The lead is said to “float” because it is not in direct contactwith, nor supported by the base 12. During the moulding process the leadwill be held at one end by clamping in the moulding machine at a dambar(not illustrated) end of the lead. Following the moulding process itwill be mechanically supported by the cured mould compound, as discussedbelow.

The base 12 of the package is typically formed of a metallic materialwhich functions to mount the semiconductor die (not illustrated inFIG. 1) thereon. The base 12 may also function as a heat sink for thesemiconductor device die and may also allow for additional electricalconnections by way of appropriate conductive contacts to thesemiconductor die, such as for example back contacts on the device dieconnecting to the base.

As illustrated in FIG. 2, following encapsulation injected mouldcompound 16 separates the base 12 from the lead 10, and as mentionedabove when cured provides mechanical support for the lead 10 on the base12. As also mentioned moulding techniques may result is some mouldflashing occurring. Minimising mould flashing may keep a section of theleads (shown by 13) free from mould compound 16 and as such may allowthe leads 10 to be wire bonded by appropriate wire bonding techniques tothe semiconductor dies 14 mounted on the base 10, at a later stage ofthe device packaging process.

A known technique for moulding or encapsulating devices is known as Film(or Foil) Assisted Moulding (FAM). FAM is a so-called transfer mouldingtechnique which uses plastic films in the mould in an attempt preventliquefied mould compound from reaching certain areas of the device, suchas portions of the leads to be wire bonded, during the moulding process.Other known methods for moulding include thermo-compression techniquesbut they do not involve the use of a film to protect against liquefiedmould compound from reaching certain areas of the device.

FIGS. 3 and 4 illustrate, in general terms, a known exemplaryarrangement for FAM, where the films 34, 36 is placed over the leads 10,base 12 and one or more semiconductor dies 14 which may be mounted onthe base 12. In this example, two films are illustrated, a first film 34for a top portion of the mould 30, and second film 36 for a bottomportion of the mould 32. During the FAM process the top 30 and bottom 32portions of the mould are closed around the base 12, leads 10 and devicedies 14. Pressure and heat are then applied to the films so that theyare sealed around the base 12, leads 10 and device dies 14.

By sealing the films in this way a first void 38 (or cavity) is createdaround the device dies 14 and by the application of pressure and heatthe film is sealed to the base 12 such that the dies 14 are protectedfrom moulding compound which will be introduced later in the mouldingprocess. In FIG. 3, for the purposes clearer illustration the relativesize of the first cavity 38, compared to the other features shown hasbeen exaggerated. A second set of cavities (also known as mouldcavities) 37 are created at the top and bottom of the leads 10, wherethe leads overlap the base, and between the leads and the base 12. Laterin the moulding process, moulding compound will be injected into themold cavities 37, thus electrically isolating the leads 10 from the base12. Once the mould compound has cured, it mechanically supports theleads 10 on the base 12, and the device can be released from themoulding machine.

Once the film is in place the transfer molding process takes place.Generally speaking the moulding process involves liquefied mouldingmaterial being forced into closed mould cavities 37 and held under heatand pressure by the top and bottom heat sink clamps 35, 39, as shown inFIG. 4, until the mould material is solidified and cured. The mould isthen opened and the encapsulated devices are unloaded, for furtherdevice processing, such as mould flash removal and wire bonding.

Film-Assisted Molding offers a number of advantages over other transfermolding techniques and known thermo-compression techniques. Theseadvantages include the easy release of the encapsulated products fromthe mold, and protection or isolation of surfaces (such as thesemiconductor device die and/or leads for later wire bonding) frommoulding compound.

However, for this process to be effective the film must be compressedsuch that it seals to prevent mould flashing of the compound escapingfrom the mould cavity, especially onto floating leads. Sealing istypically achieved by pressing the film onto the surfaces to beprotected by the heat sink clamps 35, 39 from the top and bottom of thedevice as shown in FIG. 4. Also during the moulding process with thedies already in place it is necessary to keep the device dies isolatedfrom the moulding process and the moulding compound such that the diedoes not get encapsulated thereby allowing the die to be wire bonded tothe leads post-molding.

Due to the nature of the floating leads it can difficult to applysufficient sealing pressure using heat sink clamps during the mouldingprocess because the leads are floating and not supported by the base 12.The leads are not supported by the base because it is necessary that theleads are electrically isolated from the base. During FAM it isdesirable to apply pressure to the film to prevent compound frombleeding. However, if the pressure applied is too great this will deformthe lead downwards, resulting in an downward angled (towards the base12) lead frame surface. The downward deformation makes it difficult towirebond the lead frame to the device die after the moulding process iscomplete.

Mould flashing (or polymer bleeds) on semiconductor device leads are amajor problem for device manufacturers because they significantlydegrade the solderability of the leads and specifically for surfacemount devices bleeds can cause misalignments between the printed circuitboard (PCB) and can result in the device being tilted on the PCB.Furthermore, the flashes may fall-off during the process of mountingdevices on to PCBs due to vibrations occurring during the devicemounting process. The loose flash material can fall onto the solderablearea of the PCB also causing the device to be partially or not to besoldered which can also result to package tilting on the PCB.

A known solution to the problem of mould flashing (or polymer bleeds) issimply to remove the unwanted polymer material from the leads after themoulding process has been completed. Removal method for polymer bleedsfrom the leads can be chemical such as a chemical etch, or bymechanically etching. However, such removal methods introduce a furtherprocessing step which can in turn add to the time and cost of producingdevices.

SUMMARY

The present invention seeks to provide a lead frame for a semiconductordevice which mitigates or overcomes at least one of the above mentionedproblems.

According to a first aspect there is provided a lead frame for asemiconductor device manufactured by film assisted moulding, the leadframe comprising: a base portion; and a connection lead, wherein thebase portion comprises an upper surface arranged for mounting one ormore semiconductor device dies, wherein the connection lead comprises aportion arranged horizontally with respect to the upper surface of thebase portion for external connection and an angled tip portion forconnection to the semiconductor die, and wherein the angled portion isarranged to seal against a film during moulding of the semiconductordevice.

During film assisted moulding of semiconductor devices arrangements asdescribed allow the lead frame to seal against a film and there byprevent mould bleeding or flashing onto the leads.

The angled portion may comprise a recessed portion around its peripheryor edge, where the recessed portion may act as a reservoir to collectany mould compound that may bleed during the moulding process so as toprevent any mould compound from bleeding on to the lead. The recessedportion may also act to locally deform the film such that duringmanufacture of the semiconductor device the film sits in the recessedportion to create an improved seal against mould bleeding or flashing.

DESCRIPTION OF THE DRAWINGS

The invention is described further hereinafter by way of example onlywith reference to the accompanying drawings in which:

FIG. 1 is an illustration of a floating lead and base;

FIG. 2 is a cross-sectional illustration of the floating lead and baseencapsulated in mould compound;

FIG. 3 is a schematic cross-sectional illustration of a film applied ina FAM arrangement;

FIG. 4 is a cross-sectional illustration of a FAM arrangement accordingto an embodiment;

FIG. 5 is a cross-sectional illustration of a floating lead and baseaccording to an embodiment;

FIG. 6a is a plan view of a floating lead according to an embodiment

FIG. 6b is a cross-sectional illustration showing a floating leadaccording to an embodiment; and

FIG. 6c is a cross-sectional illustration showing a floating leadaccording to an embodiment.

In the figures and the following description like reference numeralsrefer to like features.

With reference the known arrangements of FIGS. 1, 2, 3 and 4 the leads10 may be arranged to be substantially parallel with respect to the base12 such that the angle between base and the leads is substantially zero.In this context substantially parallel is within ±1 degrees off the zerodegree horizontal, in line with current manufacturing tolerances of leadframes. The zero degree horizontal is defined by the upper surface ofthe base 12 onto which the device dies 14 will be mounted.

Leads 10 which are substantially parallel, with respect to the base, mayresult in excessive bleeding of mould compound on to the leads 10.Furthermore, leads angled downwards in the direction towards the base 12(in other words, a negative angle with respect to the base) may increasethe risk of bleeding of mould compound onto the lead 10 because the filmwill not contact the end of the leads 10 and seal the lead against thefilm.

However, in accordance with an embodiment and with reference to FIG. 5,leads 10 may be arranged such that they can provide an improved sealagainst bleeding of mould compounds.

As shown in FIG. 5 a tip portion 11 of a lead 10 has a positive angle θdegrees with respect to the base 12. In this context the tip portion 11subtends a positive angle with respect to a surface of the base 12arranged to mount semiconductor dies 14. The tip portion 11 may overlapwith the base portion 12 by a distance x. The distance x may be in theregion of 0.5 to 1.2 mm and may typically be 1 mm. If the distance x isincreased then the clamping point at the dambar (not illustrated) willbe further away from the tip portion 11. The length between the dambarand lead tip will increase and thus the lead will be less rigid suchthat the force of the tip against the film will be less, therebyresulting in greater risk of bleeds or mould flashes. The remainder ofthe lead (that is, not the tip portion) will be substantially parallelto the surface of the base 12 arranged to mount semiconductor dies 14,as discussed above.

In FIG. 5, the positive angle θ may be 4 degrees ±1 degree. The positiveangle of the lead 10 may be between 3 and 10 degrees. By angling the tipportion 11 of the lead 10 in this way, bleeding of the mould compoundmay be eliminated. This may be due to the force of the tip portionpressing against the film being higher than would be the case if thelead were not angled.

Therefore, during the moulding process, due to the positive angled tipportion of the lead, the tip may be pressed into the foil resulting inan improved seal and thus preventing bleeds between the foil and thelead surface.

The thickness of the lead may be between 0.2 mm and 0.5 mm (with atolerance of ±0.008 mm). The thickness of the lead 10 may be chosen suchthat the tip portion can be deformed by the pressure during the mouldingprocess, such that following the moulding process the tip portion issubstantially horizontal with respect to the surface of the base 12arranged to mount semiconductor dies 14.

Whilst the lead may be substantially horizontal following this process,there may remain on the lead a tell tail bend mark. This mark is aresult of the metal lead having been angled to the required positiveangle θ as discussed above and then deformed to be substantially flatduring the moulding process. Such marks are well known to those skilledin the art.

The thickness of the lead should be such that it is rigid enough tocreate a seal between the lead and the foil. If the thickness of thelead is too thin, that is less than 0.2 mm the rigidity of the lead willbe lower such that the contra pressure, created by the top heat sinkclamp 35, will result in deformation of the lead without creating a sealand this may result bleeding between the lead and the foil. In thepresent context, contra pressure is the reactive force from the lead tofoil when the foil presses on the lead.

The foregoing discussion relates to the situation where the base isin-situ prior to the moulding process. However, the stilled person willrecognise that plastic bases may be moulded during the moulding process,following which device dies 14 may be attached thereto for later wirebonding to the leads 10.

Such an arrangement is typically used for MEMS pressure sensors. Wheresemiconductor dies are mounted on the moulded base following themoulding process.

Referring now to FIGS. 6a to 6c the lead 10 may also include a recessedportion 60 in the form of a groove, trench or step which extends aroundthe edge of the lead 10 proximal to the region of the base 12 where thesemiconductor die 14, to be electrically connected to the lead, will beplaced on the base 12. That is, edge of the lead 10 which may face themounted semiconductor die. As shown in FIG. 6a , the recessed portion 60may extend along the edge of the lead facing the semiconductor die 14.The recessed portion 60 may also extend partially along edges side ofthe lead which meet the edge of the lead 10 facing the semiconductor die14.

Due to the step-like or grooved nature of the recess portion 60, therecessed portion may have additional edges 61 formed by the step orgroove. The edges 61 of the recessed portion may function to contact thefoil 34 during the FAM process and cause a local deformation of the foil34 in the recessed portion 60. This local deformation of the foilcreates a barrier in the foil 34 and prevents bleeding of the mouldcompound on to the area of the lead 10 which should be kept free ofmould compound.

As illustrated in FIG. 6b the recessed portion may be a groove or trenchfeature in the lead. The foil 34 may be locally deformed into therecessed portion 60 creating a barrier to flow of mould compound.Similarly, the recessed portion is illustrated in FIG. 6c may be stepfeature in the lead. Again, as with the example of FIG. 6b , the stepfeature causes a local deformation of the foil into the recessed portioncreating a barrier to flow of mould compound.

The recessed portion may also act as a reservoir to collect any mouldcompound that may bleed during the moulding process so as to prevent anymould compound from bleeding on to the lead.

The recessed portion may be formed in the metal lead by any suitableprocess, for example by coining or stamping, or mechanical or chemicaletching.

Although FIGS. 6a to 6c , do not show an angled tip portion of the leads10, the skilled person will understand that angled tip portion may beused in conjunction with the recessed portion.

Particular and preferred aspects of the invention are set out in theaccompanying independent claims. Combinations of features from thedependent and/or independent claims may be combined as appropriate andnot merely as set out in the claims.

The scope of the present disclosure includes any novel feature orcombination of features disclosed therein either explicitly orimplicitly or any generalisation thereof irrespective of whether or notit relates to the claimed invention or mitigate against any or all ofthe problems addressed by the present invention. The applicant herebygives notice that new claims may be formulated to such features duringprosecution of this application or of any such further applicationderived there from. In particular, with reference to the appendedclaims, features from dependent claims may be combined with those of theindependent claims and features from respective independent claims maybe combined in any appropriate manner and not merely in specificcombinations enumerated in the claims.

Features which are described in the context of separate embodiments mayalso be provided in combination in a single embodiment. Conversely,various features which are, for brevity, described in the context of asingle embodiment, may also be provided separately or in any suitablesub combination.

For the sake of completeness it is also stated that the term“comprising” does not exclude other elements or steps, the term “a” or“an” does not exclude a plurality. Reference signs in the claims shallnot be construed as limiting the scope of the claims.

The invention claimed is:
 1. A lead frame for a semiconductor devicemanufactured by film assisted moulding, the lead frame comprising: abase portion; and a connection lead, and a plurality of connectionleads, wherein the base portion comprises an upper surface arranged formounting one or more semiconductor device dies, the one or moresemiconductor device dies being configured to be electrically connectedto the plurality of connection leads using respective bond wires;wherein each connection lead that is to be electrically connected to theone or more semiconductor device dies comprises a portion arrangedhorizontally with respect to the upper surface of the base portion forexternal connection and an angled tip portion for connection to thesemiconductor die, and wherein the angled tip portion is arranged to beresiliently biased against and to seal against a film during moulding ofthe semiconductor device, and wherein the angled tip portion subtends apositive angle of 3 to 10 degrees with respect to the upper surface ofthe base portion.
 2. The lead frame of claim 1, wherein the angled tipportion subtends a positive angle with respect to the upper surface ofthe base portion of between 3 and 5 degrees.
 3. The lead frame of claim2, wherein said positive angle is 4 degrees.
 4. The lead frame of claim1, wherein the connection lead is a floating lead.
 5. The lead frame ofclaim 4, wherein said floating lead is physically isolated from thebase.
 6. The lead frame of claim 1, wherein the film is an upper portionof a film used in film assisted moulding.
 7. The lead frame of claim 1,wherein the angled tip portion substantially overlaps the base portion.8. The lead frame of claim 1, wherein the tip portion is arranged tosuch that following moulding it is substantially horizontal with respectto said base portion.
 9. The lead frame of claim 8, wherein thethickness of said lead is between 0.2 mm and 0.5 mm.
 10. The lead frameof claim 1, wherein the semiconductor device is an RF device.
 11. Thelead frame of claim 10, wherein the RF device is an amplifier device.12. The lead frame of claim 1 wherein an edge of said angled portioncomprises a recessed portion.
 13. The lead frame of claim 12, whereinthe recessed portion is a step portion or a groove portion.
 14. The leadframe of claim 13, wherein said recessed portion is arranged to locallydeform said film during manufacture of said semiconductor device.
 15. Alead frame for a semiconductor device manufactured by film assistedmoulding, the lead frame comprising: a base portion; and a plurality ofconnection leads, wherein the base portion comprises an upper surfacearranged for mounting one or more semiconductor device dies, saidsemiconductor device dies being configured to be electrically connectedto the plurality of connection leads using respective bondwires; whereineach connection lead that is to be electrically connected to said one ormore semiconductor device dies comprises a portion arranged horizontallywith respect to the upper surface of the base portion for externalconnection and an angled tip portion for connection to the semiconductordie, wherein the angled tip portion is arranged to seal against a filmduring moulding of the semiconductor device, and wherein an edge of saidangled portion comprises a recessed portion.
 16. The lead frame of claim15, wherein the recessed portion is a step portion or a groove portion.17. The lead frame of claim 16, wherein said recessed portion isarranged to locally deform said film during manufacture of saidsemiconductor device.
 18. A cavity molded package comprising: a mouldedproduct comprising the lead frame of claim 1 and cured mouldingcompound, wherein the moulding compound is arranged at the top andbottom of the leads, where the leads overlap the base portion andfurther between the leads and the base portion, such that a first cavityis kept free of moulding compound, which first cavity comprising theupper surface for mounting one or more semiconductor device dies and theangled portions of the leads; one or more semiconductor device diesmounted on the upper surface of the base portion and arranged in thefirst cavity, and a plurality of bondwires connected between the one ormore semiconductor device dies and the plurality of respectiveconnection leads, wherein the angled tip portion is obtained horizontalafter the moulding process and wherein the lead contains a tail bendmark resulting from angling the lead to form the angled tip portion andthen being deformed during the moulding process to be substantiallyflat.
 19. The package of claim 18, wherein the one or more semiconductordevice dies is an RF power amplifier device.